INREMA
Semi-Automatic optical inspection machine
High-performance inspection. Fast setup. Low cost of ownership.
INREMA is Stratus’ inspection solution for reticles and chrome masks, combining high inspection performance with exceptional flexibility and a system architecture designed for demanding cleanroom environments.
Engineered to minimize contamination risk, INREMA uses air-bearing slides for all system movement, with no mechanical movement above the reticle surface. This makes the platform ideally suited for high-standard cleanroom applications where product protection and process stability are critical.
One Platform. Reticles from 4” to 14”.
INREMA supports reticle and mask sizes from 4” up to 14”, with a fast and simple nest exchange taking less than 30 seconds.
Typical setup time is under 3 minutes per reticle, while inspection of a 14” reticle can be completed in as little as 55 minutes — enabling efficient inspection without introducing unnecessary complexity into the production flow.
Reliable Die-to-Database Inspection
INREMA inspects reticles against CAD data, providing powerful die-to-database defect detection across the complete mask.
Defect detection capability is confirmed using a mask with measured defects i.e. a verimask, creating an inspection process that is repeatable, verifiable and consistent across the entire reticle surface.
In addition to defect detection, INREMA records and reports absolute height values across the reticle, providing valuable information about surface variation, damage and other potentially critical conditions.
From Inspection to Repair — and Back Again
Inspection results can be exported to virtually any compatible mask repair system. Following repair, the reticle can be returned to INREMA for verification without additional setup time, creating an efficient closed-loop inspection and repair workflow.
The review functionality simplifies defect classification by helps operators distinguish chrome from other materials.
INREMA is designed for structured chrome masks manufactured on materials including soda-lime glass, quartz and Borofloat, supporting both highly reflective and anti-reflective chrome structures, including laser-patterned masks.
Built for Low Total Cost of Ownership
Performance is only part of the equation.
INREMA was designed from the beginning to minimize operating cost. The system requires no consumables and no scheduled replacement parts, helping fabs reduce recurring inspection costs while maintaining a reliable and repeatable reticle-control process.
For IDMs operating significant reticle inventories, this can make INREMA particularly attractive for bringing more inspection capability in-house — without adding another high-cost infrastructure layer.
Looking Beyond Starlight? Meet StratusLight.
For IDMs evaluating alternatives to established reticle inspection platforms such as KLA Starlight, StratusLight offers a different approach: the inspection capability you need, without paying for complexity you don’t.
StratusLight is designed around the realities of an IDM fab, where reticle availability, fast qualification, ease of operation and predictable operating costs matter just as much as ultimate inspection sensitivity. Additional defect types found by such an inspection include chrome lift off, EDM defects, AR defects and particles.
Whether the objective is to extend the useful life of an existing Starlight installation, establish a second-source inspection strategy, increase internal inspection capacity or reduce dependence on aging inspection infrastructure, StratusLight gives IDMs another path forward.
| System | Standard Resolution (SR) | High Resolution (HR) |
|---|---|---|
|
Pixel (µm) |
0.56 |
0.25 |
|
Medium Sensitivity |
≥0.80 |
≥0.50 |
|
High Sensitivity |
≥0.45 |
≥0.25 |
|
Minimum linewidth |
≥2.0 |
≥0.90 |
|
Minimum contact hole |
≥3.00 |
≥2.00 |
|
Minimum feature size |
≥0.60 |
≥0.20 |
|
Inspection rate (min/cm^2) |
0.1 |
0.2 |
|
Setup Time / 9″ Plate (min) |
5 |
5 |
Designed for
Reticles
Length x Width x Height: 1490 mm x 1410 mm x 1530 mm
Weight: 2000 kg
Color: RAL 9003
Welded Steel frame
Granite base
Flexible Monitor arm
Voltage: 230 V AC; 3 Phase; 50 Hz
Current: 3.2 Amps
Frequency: 50 to 60 Hertz
Network: Ethernet RJ45
Air: 6 bar
Air consumption: 40l / min
Camera: Areascan
Resolution: 0.14 µm to 0.54 µm
Lens: Telecentric
Operating Temperature: 18.5°C +/- 8.5°C
Operating Humidity: 50% +/- 25%
Power Consumption: 0.31kW average